壓電驅(qū)動菱形放大式膠體微噴系統(tǒng)的建模與實(shí)驗
發(fā)布時間：2019-05-24 12:42
【摘要】：為實(shí)現(xiàn)微電子封裝領(lǐng)域各類膠體的精確微量分配,設(shè)計了基于菱形放大機(jī)構(gòu)放大壓電致動器位移的微噴系統(tǒng),利用集總參數(shù)法建立了該系統(tǒng)的等效電器模型,通過實(shí)驗驗證了模型和仿真結(jié)果的可靠性,分析了系統(tǒng)參數(shù)對膠滴體積和脫離效果的影響.實(shí)驗和仿真表明:撞針位移在0.3~0.5mm時為有利于噴射膠滴的范圍內(nèi);針對3Pa·s黏度的膠體,當(dāng)驅(qū)動氣壓在0.15~0.32MPa時,噴射體積與驅(qū)動氣壓成正相關(guān)趨勢;隨著黏度的增大,相同條件下可獲取的膠滴體積不斷減小,需要的驅(qū)動力不斷增大;對于特定黏度的膠體,在合適氣壓范圍內(nèi),調(diào)控分配頻率可實(shí)現(xiàn)對微噴體積的調(diào)節(jié).
[Abstract]:In order to realize the accurate micro distribution of all kinds of colloids in the field of microelectronic packaging, a micro spray system based on rhomboid amplification mechanism to amplify the displacement of piezoelectric actuator is designed, and the equivalent electrical model of the system is established by lumped parameter method. The reliability of the model and simulation results is verified by experiments, and the influence of system parameters on droplet volume and detachment effect is analyzed. The experimental and simulation results show that the displacement of the impingement needle is in the range of spray droplets at 0.3~0.5mm, and for the colloid with 3Pa 路s viscosity, when the driving pressure is 0.15~0.32MPa, the injection volume is positively correlated with the driving pressure. With the increase of viscosity, the volume of droplets available under the same conditions decreases and the driving force is increasing. For colloids with specific viscosity, the distribution frequency can be adjusted by adjusting the distribution frequency in the appropriate pressure range.
【作者單位】： 山東大學(xué)(威海)機(jī)電與信息工程學(xué)院;哈爾濱工業(yè)大學(xué)機(jī)器人技術(shù)與系統(tǒng)國家重點(diǎn)實(shí)驗室;
【基金】：國家自然科學(xué)基金資助項目(51605261) 博士后科學(xué)基金資助項目(2016M592179) 山東省科技發(fā)展計劃項目(2016GGX103004)
【分類號】：TN405
本文編號：2484866
[Abstract]:In order to realize the accurate micro distribution of all kinds of colloids in the field of microelectronic packaging, a micro spray system based on rhomboid amplification mechanism to amplify the displacement of piezoelectric actuator is designed, and the equivalent electrical model of the system is established by lumped parameter method. The reliability of the model and simulation results is verified by experiments, and the influence of system parameters on droplet volume and detachment effect is analyzed. The experimental and simulation results show that the displacement of the impingement needle is in the range of spray droplets at 0.3~0.5mm, and for the colloid with 3Pa 路s viscosity, when the driving pressure is 0.15~0.32MPa, the injection volume is positively correlated with the driving pressure. With the increase of viscosity, the volume of droplets available under the same conditions decreases and the driving force is increasing. For colloids with specific viscosity, the distribution frequency can be adjusted by adjusting the distribution frequency in the appropriate pressure range.
【作者單位】： 山東大學(xué)(威海)機(jī)電與信息工程學(xué)院;哈爾濱工業(yè)大學(xué)機(jī)器人技術(shù)與系統(tǒng)國家重點(diǎn)實(shí)驗室;
【基金】：國家自然科學(xué)基金資助項目(51605261) 博士后科學(xué)基金資助項目(2016M592179) 山東省科技發(fā)展計劃項目(2016GGX103004)
【分類號】：TN405
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